S300 Gas Mass Flow Controller
Requirements: Clean, dry and non-corrosive
Gas type: Air,N2,O2,Co2,He,H2,CH4,Ar,NH3,N2O,BCI3,H4Si,etc.
Full scale: (0~20, 50, 100,200,500) sccm,(0~1, 2,5, 10, 20,30,50) slm
Accuracy: 0.3%F.S(≤30%F.S),1.0%S.P.(>30%F.S.)
Range ratio: 50:1
Response time: ≤0.5s
Repetition accuracy: ±0.2%F.S.
S300 series mass flow controller (MFC) is a high-performance digital gas mass flow controller developed for photovoltaic, semiconductor, vacuum coating and other industries.
This product adopts the industrial-grade advanced flow sensor chip independently developed by the company, combined with the low-voltage loss gas circuit structure and high-precision digital control circuit and algorithm, to achieve high-precision, high-stability and wide-range ratio control over a wide temperature range.
This product is equipped with optional EtherCAT high-speed communication or Modbus RTU RS485 digital communication, which is convenient for users.
The product is assembled, calibrated and packaged in a 1000-class purification room with a temperature of 24 ± 2 ℃. In order to ensure the product quality, its accuracy, repeatability and other performance indicators must be inspected twice before delivery
This product adopts the industrial-grade advanced flow sensor chip independently developed by the company, combined with the low-voltage loss gas circuit structure and high-precision digital control circuit and algorithm, to achieve high-precision, high-stability and wide-range ratio control over a wide temperature range.
This product is equipped with optional EtherCAT high-speed communication or Modbus RTU RS485 digital communication, which is convenient for users.
The product is assembled, calibrated and packaged in a 1000-class purification room with a temperature of 24 ± 2 ℃. In order to ensure the product quality, its accuracy, repeatability and other performance indicators must be inspected twice before delivery
