S500 Gas Mass Flow controller
Requirements: Clean, dry and non-corrosive
Gas type: Air,N2,O2,Co2,He,H2,CH4,Ar,etc.
Full scale: (0~20, 50, 100,200,500) sccm,(0~1, 2,5, 10, 20) slm
Accuracy: 0.3%F.S(≤30%F.S),1.0%S.P.(>30%F.S.)
Range ratio: 100:1
Response time: ≤0.5s
Repetition accuracy: ±0.2%F.S.
S500 series mass flow controller (MFC) is a high-performance digital gas mass flow controller developed for photovoltaic, semiconductor, vacuum coating and other industries.
This product adopts the industrial-grade advanced flow sensor chip independently developed by the company, combined with the low-voltage loss gas circuit structure and high-precision digital control circuit and algorithm, to achieve high-precision, high-stability and wide-range ratio control over a wide temperature range.
